NDLI: Realization of a physical mask by laser micro-cutting process

Content Provider	IEEE Xplore Digital Library
Author	Bonserio, C. Giannini, M. Losacco, A.M. Pappalettera, G.
Copyright Year	2007
Description	Author affiliation: Centro Laser s.c.a r.l., Valenzano (Bonserio, C.; Giannini, M.; Losacco, A.M.; Pappalettera, G.)
Abstract	Laser micromachining is a rapidly developing technology which allows to carry out laser material processing as cutting, drilling, marking and engraving on a millimetric or sub-millimetric dimensional scale which can be applied to the fabrication of micro-devices. The use of laser sources emitting very short pulses (a few ns) focalized on very small areas (laser spot diameters of a few mum) and micro-positioning systems of high velocity and precision, allows to execute high-resolution works, considerably reducing the processed area and the heat-affected zone so that to assure a good profile and surface quality. The aim of this work is to identify the optimal process parameters for the fabrication of physical masks useful to the realization of electronic devices as sensors or MEMS. A typical application is as transducer element in a biosensor, an analytical device which converts a biological response into an electrical signal. This configuration provides a highly sensitive biosensor capable of yielding good response even when the amount of a sample is extremely small.
Starting Page	1
Ending Page	4
File Size	472443
Page Count	4
File Format	PDF
ISBN	9781424412440
DOI	10.1109/IWASI.2007.4420037
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Drilling Micromechanical devices Laser theory Optical device fabrication Surface emitting lasers Micromachining Materials processing Biosensors Laser beam cutting Optical pulses
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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