NDLI: Gas sensors based on porous silicon and palladium oxide clusters

Content Provider	IEEE Xplore Digital Library
Author	Pedrero O., L. Pena-Sictra, R. Romero Paredes R., G.
Copyright Year	2004
Description	Author affiliation: CTNVESTAV-IPN, Departamento de Ingenieria Electrica, Seccion de Electronica del Estado Solido, AV. IPN # 2508,0700 Mexico DF. Apdo. Postal 14-740 (Pedrero O., L.; Pena-Sictra, R.; Romero Paredes R., G.)
Abstract	Palladium oxide/porous silicon (PdO/PS) structures were developed for studying their behavior with gas molecules as hydrogen, ammonia and some others similar molecules. A lot of work has been done in demonstrating the usefulness of palladium (Pd) in sensing hydrogen containing gas compounds. However there is not confidence if the main role in the sensing process is just Pd or palladium oxide (PdO). Therefore our work was directed to distinguish the role of PdO in the sensing process. The structures were based on porous silicon (PS) films prepared by anodization of silicon substrates. The PS films were prepared using several etching current densities for obtaining films with distinct porous densities. Pd clusters was deposited on PS films either by adding palladium chloride in the electrolytic bath or in a second process by an electroless step using an autocatalytic bath just after silicon anodization. After that the films were subjected to an oxidization process in an oxygen atmosphere to transform the Pd deposit into PdO clusters. The temporal response of films as resistive sensors are discussed in terms of a possible initial surface composition of the studied structures. The response of the PdO/PS sensor can be explained by considering the influence of PdO particles on the PS surface. The catalytic decomposition of hydrogen containing molecules by the PdO particles is a more efficient process than the use of metallic palladium ones. The objectives in this work are to demonstrate that metal oxide clusters on PS layers can improve sensitivity and also that it has effects on sensor selectivity.
Starting Page	276
Ending Page	281
File Size	925271
Page Count	6
File Format	PDF
ISBN	0780385314
DOI	10.1109/ICEEE.2004.1433892
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-09-08
Publisher Place	Mexico
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Chemical sensors Semiconductor films Surface resistance Porous Silicon Hydrogen Photoluminescence Palladium Thin film sensors Pd Silicon PdO cIusters Optical films electroless deposition Gas sensors Gas detectors
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Optical Fiber Hydrogen Sensors with Pd/W03 Composite Thin Film by Magntron Co-Sputtering

Nanoporous Pd Film Sensors for Detection of High Concentration Hydrogen

Enhanced oxygen adsorption activity by CuO catalyst clusters on SnO2 thin film based sensors

Photopyroelectric Pd-PVDF hydrogen sensor

The effect of dopants on the sensing selectivity of SnO/sub 2/ thin films-based gas sensors

Gas sensing applications of novel semiconductor materials

ZnO thin films synthesized by chemical vapor deposition

Study of Ga/sub 2/O/sub 3/ thin film gas sensors

Recent progress on gas sensors based on semiconducting thin films

Gas sensors based on porous silicon and palladium oxide clusters

Similar Documents

Optical Fiber Hydrogen Sensors with Pd/W03 Composite Thin Film by Magntron Co-Sputtering

Nanoporous Pd Film Sensors for Detection of High Concentration Hydrogen

Enhanced oxygen adsorption activity by CuO catalyst clusters on SnO2 thin film based sensors

Photopyroelectric Pd-PVDF hydrogen sensor

The effect of dopants on the sensing selectivity of SnO/sub 2/ thin films-based gas sensors

Gas sensing applications of novel semiconductor materials

ZnO thin films synthesized by chemical vapor deposition

Study of Ga/sub 2/O/sub 3/ thin film gas sensors

Recent progress on gas sensors based on semiconducting thin films

Gas sensors based on porous silicon and palladium oxide clusters