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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zhaonian Cheng Weidong Huang Xia Cai Bulu Xu Le Luo Xinxin Li |
| Copyright Year | 2004 |
| Description | Author affiliation: Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai, China (Zhaonian Cheng; Weidong Huang; Xia Cai; Bulu Xu; Le Luo; Xinxin Li) |
| Abstract | In this work, the finite element simulations have been applied in frequency-domain and time-domain analyses for a packaged MEMS accelerometer used in high-G environments. The results from simulations of packaging effects on the performances of MEMS for high-G accelerometer show that the Young's moduli of seal adhesive has important influences on the mode shapes of the packaged accelerometer and a small Young's modulus will bring in strong distortion of output signal of accelerometer. As the Young's moduli increased, the waveform of accelerometer output signal became better after digital filtering. The seal adhesive with Young's modulus like molding compound in IC packaging would not induce significant problems in signal distortion. The frequency and averaged amplitude of output signal of the packaged accelerometer were not affected by Young's modulus of seal material. The accelerometer output was linearly dependent on the input of acceleration impulse and the response was very well when the input of the acceleration amplitudes changed. |
| Starting Page | 282 |
| Ending Page | 289 |
| File Size | 985414 |
| Page Count | 8 |
| File Format | |
| ISBN | 0780386205 |
| DOI | 10.1109/HPD.2004.1346712 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2004-07-03 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Packaging Micromechanical devices Accelerometers Frequency domain analysis Time domain analysis Seals Distortion Acceleration Finite element methods Analytical models |
| Content Type | Text |
| Resource Type | Article |
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