NDLI: Active field canceling system in next generation nano-Fab

Content Provider	IEEE Xplore Digital Library
Author	Feng-Chang Chuang Yu-Lin Song Chwen Yu Sen-Gui Shsu Tzyh-Ghuang Ma Tzong-Lin Wu Luh-Maan Chang Ching-Yuan Yang
Copyright Year	2011
Description	Author affiliation: Department of Electrical Engineering National Chung Hsing University, Taichung, Taiwan (Feng-Chang Chuang; Ching-Yuan Yang) \|\| Taiwan Semiconductor Manufacturing Company, Ltd. Hsinchu, Taiwan (Chwen Yu) \|\| Department of electrical engineering, National Taiwan University of Science and Technology, Taipei, Taiwan (Tzyh-Ghuang Ma) \|\| Yen Tjing Ling Industrial Research Institute, National Taiwan University, Taipei, Taiwan (Yu-Lin Song) \|\| Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan (Sen-Gui Shsu; Tzong-Lin Wu) \|\| Department of Civil Engineering, National Taiwan University, Taipei, Taiwan (Luh-Maan Chang)
Abstract	The extremely low frequency (ELF) magnetic fields from power-line current influences the yield of CMOS foundry. The poor yield happens because of ELF magnetic fields inducing directly the measurement or process equipment for cutting-edge chips below 28 nm process. The equipment of Electron microscopes, included SEM, TEM, STEM, FIB writers and E-Beam Writers are very susceptible to ELF magnetic fields emanating from various electrical power sources outside of the building and within next generation CMOS foundry recommends a maximum of 0.3 mG. There are three methods to reduce EMI, including active canceling system, passive shielding and hybrid canceling technology. The disadvantages of passive shielding is that needs expensive material shielding build anti-magnetic chamber protecting sensitive equipment with high-mu materials which is the standard method in most cases of shielding. Furthermore, active system is more flexible than passive method. The active canceling method uses active coils with current sensing field via sensor and inducing man-made electromagnetic field to reduce the stray magnetic field. Unfortunately, the conventional system takes more time to products field because of parasitical capacitance and resistance in long coil. The longer canceling coil we construct, the more time it takes. Besides, We should spend more time on calibrating non-linear current amplifier through software design. This research designs simpler anti-electro-magnetic system instead of typical frame and develops one turn canceling coil structure to reduce delaying time. Several parallel cells generates field up to 23.81 mG controlled by MCU. This system decreases the power-line inducing filed below 0.3mG.
Starting Page	1
Ending Page	4
File Size	181177
Page Count	4
File Format	PDF
ISBN	9781457702051
e-ISBN	9789881558121
DOI	10.1109/PESA.2011.5982952
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-08
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetic fields Coils Frequency conversion Geophysical measurement techniques Resistance Ground penetrating radar Generators hybrid shielding Extremely low frequency power-line current CMOS foundry passive shielding actives shielding
Content Type	Text
Resource Type	Article

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