NDLI: Electrical scanning probe microscopes to address industrial nano-metrology needs of integrated circuits and nanoelectronic devices

Content Provider	IEEE Xplore Digital Library
Author	Kopanski, J.J.
Copyright Year	2014
Description	Author affiliation: Semicond. & Dimensional Metrol. Div., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA (Kopanski, J.J.)
Abstract	Electrical modes of scanning probe microscopes have found considerable metrology applications in integrated circuits and emerging nano-electronic devices. This paper will review the critical metrology needs that electrical SPMs have addressed in the integrated circuit industry and further applications for the characterization of nano-electronic devices. Solutions to metrology problems addressed by electrical SPM modes including the scanning capacitance microscope (SCM), scanning Kelvin force microscope (SKFM), scanning microwave microscope (SMM), scanning spreading resistance microscope (SSRM), conductive-AFM (c-AFM), and magnetic force microscopy (MFM) will be reviewed.
Starting Page	214
Ending Page	215
File Size	177778
Page Count	2
File Format	PDF
ISBN	9781479952052
ISSN	21600171
e-ISBN	9781479924790
DOI	10.1109/CPEM.2014.6898335
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-08-24
Publisher Place	Brazil
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microscopy Metrology Magnetic force microscopy Semiconductor device measurement Nanoscale devices Transmission line measurements Surface topography through silicon vias scanning probe microscopy semiconductor device doping semiconductor-insulator interfaces semiconductor-metal interfaces three-dimensional integrated circuits III–V semiconductor materials
Content Type	Text
Resource Type	Article

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