NDLI: High-stress and overrange behavior of sealed-cavity polysilicon pressure sensors

Content Provider	IEEE Xplore Digital Library
Author	Chau, K.H. Fung, C.D. Harris, P.R. Panagou, J.G.
Copyright Year	1990
Description	Author affiliation: Foxboro Co., MA, USA (Chau, K.H.; Fung, C.D.; Harris, P.R.; Panagou, J.G.)
Abstract	The overrange behavior of sealed-cavity polysilicon pressure sensors with full-scale pressures ranging from 35 to 300 psi (0.24 to 2.0 MPa) is investigated. Because of a built-in overpressure stop, rupture pressure between 3500 to 6000 psi (24 to 41 MPa) was observed. After repetitive cycles of overpressure to 3000 psi, no degradation in sensor performance was apparent, and the zero repeatability was better than 0.1% of span. These results demonstrate the outstanding overrange capabilities of sealed-cavity polysilicon sensors and the exceptional mechanical strength and reproducibility of polysilicon diaphragms for pressure sensing. The excellent built-in overrange protection represents a significant advantage of the sealed-cavity polysilicon sensors for industrial applications where high overrange pressure is common.
Starting Page	181
Ending Page	183
File Size	199268
Page Count	3
File Format	PDF
DOI	10.1109/SOLSEN.1990.109849
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1990-06-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resistors Silicon Mechanical sensors Substrates Etching Testing Temperature sensors Reproducibility of results Piezoresistance Fabrication
Content Type	Text
Resource Type	Article

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