NDLI: An integration approach for graphene double-gate transistors

Content Provider	IEEE Xplore Digital Library
Author	Vaziri, S. Smith, A.D. Henkel, C. Ostling, M. Lemme, M.C. Lupina, G. Lippert, G. Dabrowski, J. Mehr, W.
Copyright Year	2012
Description	Author affiliation: Leibniz-Institut für Innovative Mikroelektronik, IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany (Lupina, G.; Lippert, G.; Dabrowski, J.; Mehr, W.) \|\| School of Information and Communication Technology KTH Royal Institute of Technology 16440 Kista, Sweden (Vaziri, S.; Smith, A.D.; Henkel, C.; Ostling, M.; Lemme, M.C.)
Abstract	In this work, we propose an integration approach for double gate graphene field effect transistors. The approach includes a number of process steps that are key for microelectronics integration: bottom gates with ultra-thin (2nm) high-quality thermally grown SiO dielectrics, shallow trench isolation between devices and atomic layer deposited Al top gate dielectrics. The complete process flow is demonstrated with fully functional GFET transistors and can be extended to wafer scale processing and other graphene-based devices.
Starting Page	250
Ending Page	253
File Size	2094861
Page Count	4
File Format	PDF
ISBN	9781467317078
ISSN	19308876
e-ISBN	9781467317085
e-ISBN	9781467317061
DOI	10.1109/ESSDERC.2012.6343380
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-09-17
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Logic gates Aluminum oxide Dielectrics Silicon Transistors Films
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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