NDLI: Horizontal Current Bipolar Transistor (HCBT) for the low-cost BiCMOS technology

Content Provider	IEEE Xplore Digital Library
Author	Suligoj, T. Koricic, M. Mochizuki, H. Morita, S. Shinomura, K. Imai, H.
Copyright Year	2009
Description	Author affiliation: University of Zagreb, Department of Electronics, HR-10000, Croatia (Suligoj, T.; Koricic, M.) \|\| Asahi Kasei Microdevices Co., Nakagawara-cho, Nobeoka, Miyazaki, 882-0031, Japan (Mochizuki, H.; Morita, S.; Shinomura, K.; Imai, H.)
Abstract	A new Horizontal Current Bipolar Transistor (HCBT) is developed and integrated with a commercial 0.18 µm CMOS technology resulting in a very low-cost BiCMOS technology suitable for wireless applications. The number of fabrication steps is significantly reduced in comparison to conventional vertical-current bipolar transistors. The optimum HCBT performance can be achieved by 3 additional masks to CMOS process while an even simpler version with 2 additional masks is also demonstrated. The integration of HCBT with bulk CMOS is achieved by introducing innovative process steps such as protecting the active transistor region during polysilicon etching by low-resistance native oxide, placement of high-doped emitter and collector regions in oxide trenches etc. The compact HCBT structure has small junction capacitances and f and f of 34 GHz and 45 GHz, respectively, with BV=3.4 V.
Starting Page	359
Ending Page	362
File Size	1209688
Page Count	4
File Format	PDF
ISBN	9781424443512
ISSN	19308876
DOI	10.1109/ESSDERC.2009.5331550
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-14
Publisher Place	Greece
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bipolar transistors BiCMOS integrated circuits CMOS technology CMOS process Radio frequency Fabrication Isolation technology Integrated circuit technology Silicon germanium Germanium silicon alloys
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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