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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Fekri, A. Nabavi, M. Radeljic-Jakic, N. Chang, Z.-Y. Pertijs, M. Nihtianov, S. |
| Copyright Year | 2014 |
| Description | Author affiliation: Electron. Instrum. Lab., Delft Univ. of Technol., Delft, Netherlands (Fekri, A.; Nabavi, M.; Radeljic-Jakic, N.; Chang, Z.-Y.; Pertijs, M.; Nihtianov, S.) |
| Abstract | This paper describes a smart Eddy-current displacement sensor for use in precision industrial applications. A novel readout scheme based on ratio-metric delta-sigma analog-to-digital conversion is proposed. The system employs two sensing coils incorporated in a low-power front-end oscillator. This produces two anti-phase outputs whose amplitudes are proportional to the inductances of the coils, and are thus a differential function of displacement. After synchronous down-conversion, these signals are fed into a second-order continuous-time delta-sigma modulator that directly produces a digital output that is a ratio-metric function of the coil inductances. This approach eliminates the need for a stable voltage reference, suppresses the oscillator's multiplicative noise contributions, and effectively filters the ripple associated with the down-conversion. The sensors are excited at 15 MHz, which reduces the eddy-current penetration depth to only a few tens of μm. The interface has been realized in a 0.35 μm BiCMOS technology and consumes 18 mW from a 3.3 V supply. In a measurement time of 1 ms, it digitizes the inductance ratio with a resolution of 15 bits, and thus achieves a displacement resolution of 135 nm on a range of 3 mm. |
| Starting Page | 403 |
| Ending Page | 406 |
| File Size | 2954571 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479956944 |
| ISSN | 19308833 |
| e-ISBN | 9781479956968 |
| DOI | 10.1109/ESSCIRC.2014.6942107 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-09-22 |
| Publisher Place | Italy |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Coils Modulation Oscillators Displacement measurement Current measurement Gain Pollution measurement delta-sigma modulator Eddy current Displacement sensor ratio-metric measurement |
| Content Type | Text |
| Resource Type | Article |
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