NDLI: Integrated sensor for light source position measurement applicable in SOI technology

Content Provider	IEEE Xplore Digital Library
Author	Koch, C. Oehm, J. Emde, J. Budde, W.
Copyright Year	2007
Description	Author affiliation: Ruhr-Univ. Bochum, Bochum (Koch, C.; Oehm, J.; Emde, J.) Integrated optical sensors make use of a p-n-junction for light intensity detection, typically. Because of the costs, additional optical components are not available in standard integration processes. Therefore, in higher level optical sensors extra optical components are not part of an integration. In this paper a concept for integration is proposed, which especially allows to measure the angles of a far distance light source relative to the surface of the chip and the coordinate system of the integrated structure. The invention makes use of the stack topology and the light opacity of metal layers in the monolithic integration, the light translucency of $SiO_{2},$ and the electrical light sensitivity of p-n-junctions. The implementation can be done most advantageously in SOI CMOS technology. With minor modifications it is applicable in other integration technologies as well.
Starting Page	103
Ending Page	106
File Size	312991
Page Count	4
File Format	PDF
ISBN	9781424411252
ISSN	19308833
DOI	10.1109/ESSCIRC.2007.4430256
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-09-11
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Light sources Position measurement CMOS technology Optical sensors Optical devices Costs Coordinate measuring machines Semiconductor device measurement Goniometers Topology
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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