NDLI: Implementation of a simulation-based short-term lot arrival forecast in a mature 200mm semiconductor FAB

Content Provider	IEEE Xplore Digital Library
Author	Scholl, W. Boon Ping Gan Lendermann, P. Noack, D. Rose, O. Preuss, P. Pappert, F.S.
Copyright Year	2011
Description	Author affiliation: Infineon Technologies Dresden, Koenigsbruecker Strasse 180, 01099, GERMANY (Scholl, W.) \|\| Dresden University of Technology, Institute of Applied Computer Science, 01062, GERMANY (Noack, D.; Rose, O.) \|\| D-SIMLAB Technologies GmbH, Wiener Platz 6, Dresden 01069, GERMANY (Preuss, P.; Pappert, F.S.) \|\| D-SIMLAB Technologies Pte Ltd, 8 Jurong Town Hall Road #30-04 JTC Summit, Singapore 609434, SINGAPORE (Boon Ping Gan; Lendermann, P.)
Abstract	The ability to perform lot arrival forecast at work center level is a key requirement for pro-active FAB operation management. Visibility to this information enables preemptive resource allocation and bottleneck management. Today, the work center lot arrival forecast is achieved through the use of short term simulation technique in Infineon Dresden. High fidelity simulation model that includes detailed modeling feature such as attribute-based sampling procedure, dedication and temporary tool blocking is built automatically through the transformation of data queries from data sources. In this paper, we present the results of our model validation work, comparing the FAB and forecasted lot arrival of the defect density measurement work center. Due to the high capacity demand of automotive product that requires more than 20 inspection steps; engineering lots and preventive maintenance of DDM must be scheduled at the right time. This can only be achieved with high quality lot arrival forecast.
Starting Page	1927
Ending Page	1938
File Size	427568
Page Count	12
File Format	PDF
ISBN	9781457721083
ISSN	08917736
e-ISBN	9781457721090
e-ISBN	9781457721076
DOI	10.1109/WSC.2011.6147907
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-12-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Data models Engines Semiconductor device modeling Predictive models Production Load modeling Databases
Content Type	Text
Resource Type	Article
Subject	Modeling and Simulation Computer Science Applications Software

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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