NDLI: Reusable tool for 300mm intrabay AMHS modeling and simulation

Content Provider	IEEE Xplore Digital Library
Author	El-Nashar, A. El-Kilany, K.S.
Copyright Year	2007
Description	Author affiliation: Univ. of Central Florida, Orlando (El-Nashar, A.)
Abstract	The transition to 300 mm wafer size introduced a lot of new technologies to wafer fabrication facilities that mandated the presence of intrabay automated material handling systems (AMHS) for moving wafer carriers between the stackers and production tools within a bay. The design of intrabay AMHS depends on the configuration and the mode of delivery. A generic reusable tool is developed for modeling and simulation of the 300 mm intrabay AMHS different designs. The tool relies on a built-in database and a library containing the different components of intrabay AMHS and the different processing tools. The design of the generic tool guarantees its reusability for building different models of bays with virtually any design. The tool output includes a number of AMHS performance metrics that can be used effectively in comparing different designs of an intrabay AMHS.
Starting Page	1789
Ending Page	1797
File Size	566586
Page Count	9
File Format	PDF
ISBN	9781424413058
DOI	10.1109/WSC.2007.4419804
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-12-09
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Semiconductor device modeling Fabrication Control systems Materials handling Engineering management Materials science and technology Databases Buildings Manufacturing industries Semiconductor materials
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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