NDLI: Robust digital control of nonlinear microelectro-mechanical actuators using sliding-mode control

Content Provider	IEEE Xplore Digital Library
Author	Yazdi, N. Sane, H. Mastrangelo, C.H.
Copyright Year	2004
Description	Author affiliation: Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA (Yazdi, N.)
Abstract	This paper presents an overview of high precision robust digital control of MEMS nonlinear actuators, in particular torsional electrostatic actuators, using sliding-mode control [N. Yazdi et al. (2003), H. Sane et al. (2004)]. Sliding-mode control enables compact realization of a robust controller tolerant of device characteristic variations, nonlinearities and many types of inherent instabilities. Application of 1/sup st/ order SMC to the control of dual-axis torsional actuators beyond their pull-in limit is demonstrated. Also a modified SMC scheme which uses adaptive switching of the sliding-mode variable differential gain to improve control precision is presented. The modified scheme has resulted in average reduction of 44-56% in output chatter and 70-91% when used for control of several 2-axis gimbaled beam steering micromirrors with a wide range of mechanical characteristics.
Starting Page	34
Ending Page	38
File Size	711950
Page Count	5
File Format	PDF
ISBN	0780386221
DOI	10.1109/ACSSC.2004.1399081
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-11-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Robust control Digital control Sliding mode control Electrostatic actuators Electric variables control Mechanical variables control Micromechanical devices Control nonlinearities Programmable control Adaptive control
Content Type	Text
Resource Type	Article

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