NDLI: Programmable factory IC manufacturing for the 21st century

Content Provider	IEEE Xplore Digital Library
Author	Saraswat, K.C.
Copyright Year	1993
Description	Author affiliation: Dept. of Electr. Eng., Stanford Univ., CA, USA (Saraswat, K.C.)
Abstract	Stanford University have built a large interdisciplinary program aimed at exploring radically different semiconductor manufacturing opportunities. The approach is to build a highly flexible computer controlled manufacturing facility-the programmable factory and in parallel with this factory, a suite of simulation tools the virtual factory which emulate all functions of the real factory. Controlling both of these and integrating them is the manufacturing automation. The programmable factory is an alternative approach to IC fabrication, based on a new generation of multifunctional equipment with extensive use of computer integrated manufacturing (CIM) for added flexibility. The new type of multiprocessing equipment quickly processes one semiconductor wafer at a time, performs several process steps in situ- in contrast to the conventional alternative of slowly processing many wafers simultaneously and one step per equipment. Single wafer processing enables the use of in-situ monitoring and real-time control. The process equipment is also modular, with common mechanical and electronic interfaces. Such modularization and standardization is expected to decrease the amount and expense of equipment that must be purchased for existing fabs to upgrade to new generations of technology. Extensive use of CIM for specification, monitoring, control, and information management should make switching between processes faster and more reliable, should increase the case by which large numbers of different products could simultaneously be routed and tracked through the factory, and maximize equipment utilization.
Starting Page	2
Ending Page	6
File Size	561152
Page Count	5
File Format	PDF
ISBN	0780312120
DOI	10.1109/ISMSS.1993.263709
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1993-07-19
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Production facilities Semiconductor device manufacture Computer integrated manufacturing Computer aided manufacturing Automatic control Virtual manufacturing Monitoring Concurrent computing Flexible manufacturing systems Computational modeling
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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