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Content Provider | IEEE Xplore Digital Library |
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Author | Manea, E. Budianu, E. Purica, M. Podaru, C. Cernica, I. Coraci, A. Baharada, F. |
Copyright Year | 2005 |
Description | Author affiliation: Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania (Manea, E.; Budianu, E.; Purica, M.; Podaru, C.; Cernica, I.; Coraci, A.) |
Abstract | This paper presents a new silicon solar cell structure obtained by the front surface texturisation using silicon micromachining technologies. A 'honeycomb' textured front surface has been obtained using a photolitographic process to generate patterns (disc holes) on the top surface followed by isotropic etching in HNO/sub 3/ : HF : CH3COOH up to join together of the wells. For the front surface losses characterization, the spectral dependence reflection has been investigated by spectrophotometric measurements. The surface reflectivity was lowered at 5% (30% in the case of untextured monocrystalline surface). The p-n junction made by phosphorus diffusion at /spl sim/0.8 /spl mu/m follows the honeycomb profile. In order to ensure low series resistances a p+ bor diffusion on the back of the structure was made. The fabrication process was completed with an ohmic contacts (Al: on top and on the back surface). |
Starting Page | 157 |
Ending Page | 160 |
File Size | 2053650 |
Page Count | 4 |
File Format | |
ISBN | 0780392140 |
DOI | 10.1109/SMICND.2005.1558735 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2005-10-03 |
Publisher Place | Romania |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Silicon Photovoltaic cells Surface texture Micromachining Solar power generation Etching Hafnium Reflection Electrical resistance measurement Loss measurement |
Content Type | Text |
Resource Type | Article |
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