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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ikuta, K. |
| Copyright Year | 1990 |
| Description | Author affiliation: Dept. of Math. Eng. & Inf. Phys., Tokyo Univ., Japan (Ikuta, K.) |
| Abstract | Shape memory alloy (SMA) has great potential for microminiature actuators. The feasibility is discussed, and theoretical estimates based on scale effect are presented. Control schemes for microminiature SMA servoactuators are discussed, and a control scheme is proposed. Combined with electric resistance feedback and position feedback, it enables the author to control stiffness of SMA directly and to sense force without a force sensor. Experimental verifications are reported. The application of a miniature SMA actuator to a miniature clean gripper with position-force hybrid control for microelectronics manufacture is presented. Fabrication of a thin film micro SMA actuator is investigated. |
| Starting Page | 2156 |
| Ending Page | 2161 |
| File Size | 710330 |
| Page Count | 6 |
| File Format | |
| ISBN | 0818690615 |
| DOI | 10.1109/ROBOT.1990.126323 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1990-05-13 |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Shape memory alloys Actuators Force feedback Force sensors Estimation theory Electric resistance Force control Grippers Microelectronics Manufacturing |
| Content Type | Text |
| Resource Type | Article |
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