NDLI: Schedule stabilization and robust timing control for time-constrained cluster tools

Content Provider	IEEE Xplore Digital Library
Author	Ja-Hee Kim Tae-Eog Lee
Copyright Year	2003
Description	Author affiliation: Dept. of Ind. Eng., KAIST, Taejon, South Korea (Ja-Hee Kim; Tae-Eog Lee)
Abstract	Stable schedules that repeat identical timing patterns for each work cycle have been important implication for cyclic manufacturing systems such as cluster tools for semiconductor manufacturing or flexible manufacturing systems. While it has been claimed that stable schedules have advantages including steady operation, predictable behavior, minimum cycle times, less work-in-progress inventory, recently stable schedules also play essential roles for meeting critical time window constraints on the operations such as wafer residency time constraint in a cluster tool or track equipment for some chemical vapor deposition processes or wet cleaning processes. However, when the process times or robot task times are subject to random variation of abrupt random disturbances, the stable schedule is disturbed and the perturbed wafer residency times may violate time window constraints. We prove that a cluster tool with dual arms, after any schedule disturbance, can be stabilized to the stable schedule. We characterize the condition for stabilization based on the event graph theory. We also present a control strategy that guarantees such stabilization and reduces the stabilization time.
Sponsorship	IEEE Robotics & Autom. Soc. Nat. Sci. Council, Taiwan, Ministr. Educ., Taiwan
Starting Page	1039
Ending Page	1044
File Size	480944
Page Count	6
File Format	PDF
ISBN	0780377362
ISSN	10504729
DOI	10.1109/ROBOT.2003.1241729
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-09-14
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Robust control Timing Job shop scheduling Time factors Flexible manufacturing systems Manufacturing systems Semiconductor device manufacture Chemical vapor deposition Cleaning Robots
Content Type	Text
Resource Type	Article
Subject	Artificial Intelligence Control and Systems Engineering Electrical and Electronic Engineering Software

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