NDLI: 300 mm full automation integration test methodology and experience

Content Provider	IEEE Xplore Digital Library
Author	Ming Wang Chang, E. Liu, J.
Copyright Year	2002
Description	Author affiliation: Taiwan Semicond. Manuf. Co., Hsin-Chu, Taiwan (Ming Wang)
Abstract	Taiwan Semiconductor Manufacturing Company launched the first 300 mm fully automation foundry in 1999. The newly introduced technology will automate the 300 mm fab for better manufacturing control and less human labor. Based on the accumulated TSMC data from year 1999 to year 2000, it is found that to maintain is more difficult than to build up the system. It is a great challenge to integrate so many hardware and software components closely. In fact, few 300 mm foundries are successful from the maintenance point of view. TSMC is still continuing to improve the full fab automation by strict integration test methodology and refer to daily problem analysis system. TSMC enlarges the acceptance test scope to cover the process equipment, transportation, material control and manufacturing system. In order to make sure the integration is smooth and on the right track, TSMC has developed a methodology to execute hardware and software integration. Here TSMC exposes some of the critical issues and shares the experience for unmanned factory. TSMC believes these can help the 300 mm fab to speed up the system construction task and find out their own problems by TSMC's methodology and experience.
Sponsorship	IEEE Robotics & Autom. Soc
Starting Page	3613
Ending Page	3618
File Size	466207
Page Count	6
File Format	PDF
ISBN	0780372727
DOI	10.1109/ROBOT.2002.1014270
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-05-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Automatic testing Manufacturing automation Semiconductor device manufacture Foundries Automatic control Hardware System testing Humans Materials testing Transportation
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Overview for 300 mm foundry manufacturing

Prioritized automatic material handling services in 300 mm foundry manufacturing

300 mm factory automation experience and challenges for wafer foundry fabs

Factory automation migration experience for foundry fab from 200 mm to 300 mm

Contamination control in 300 mm foundry

Development of national skill standards for technicians working in highly automated (300 mm) environments

An optimal OHT dispatching system for 300 mm semiconductor manufacturing

A management and control framework for prioritized automated material handling services in 300 mm wafer foundry

An automatic monitor management system for effective 300 mm fab operations

300 mm full automation integration test methodology and experience

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