NDLI: Micro object handling under SEM by vision-based automatic control

Content Provider	IEEE Xplore Digital Library
Author	Kasaya, T. Miyazaki, H. Saito, S. Sato, T.
Copyright Year	1999
Description	Author affiliation: Dept. of Mechatronics, Tokyo Eng. Univ., Japan (Kasaya, T.)
Abstract	There is a great demand for the highly accurate and reliable arrangement of micro objects smaller than 100 /spl mu/m in order to construct micro devices. Since micro objects tend to adhere to other objects by electrostatic force, it is possible to pick them up easily by contact with a needle tip instead of grasping by tweezers. On the other hand, it is difficult to place them on a substrate. To solve this problem, we have proposed a handling method by controlling the contact face area, i.e. picking up the object by contact with the center of the tool-tip plane, and placing it by contact with the edge and also inclining the tool. However, it is difficult to execute this operation by manual control, because it requires delicate movement by the manipulator, in order not to break the object or flip it away. In this study, we automate this pick-and-place operation by visual and force control. Moreover, to arrange micro objects with high accuracy and reliability, all necessary functions such as calibration, object search, and positioning are integrated, and an automatic handling system is constructed. We successfully demonstrated a completely automatic arrangement of several micro objects of 30 /spl mu/m in diameter under SEM monitoring.
Starting Page	2189
Ending Page	2196
File Size	794600
Page Count	8
File Format	PDF
ISBN	0780351800
ISSN	10504729
DOI	10.1109/ROBOT.1999.770431
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-05-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Automatic control Scanning electron microscopy Adhesives Electrostatics Needles Human factors Force control Calibration Computerized monitoring Mechatronics
Content Type	Text
Resource Type	Article
Subject	Artificial Intelligence Control and Systems Engineering Electrical and Electronic Engineering Software

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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