NDLI: 500–600 GHz submillimeter-wave 3.3 bit RF MEMS phase shifter integrated in micromachined waveguide

Content Provider	IEEE Xplore Digital Library
Author	Shah, U. Decrossas, E. Jung-Kubiak, C. Reck, T. Chattopadhyay, G. Mehdi, I. Oberhammer, J.
Copyright Year	2015
Description	Author affiliation: KTH R. Inst. of Technol., Stockholm, Sweden (Shah, U.; Oberhammer, J.) \|\| Jet Propulsion Lab., Pasadena, CA, USA (Decrossas, E.; Jung-Kubiak, C.; Reck, T.; Chattopadhyay, G.; Mehdi, I.)
Abstract	This paper presents a 500-600 GHz submillimeter-wave MEMS-reconfigurable phase shifter. It is the first ever RF MEMS component reported to be operating above 220 GHz. The phase shifter is based on a micromachined rectangular waveguide which is loaded by 9 E-plane stubs, which can be individually blocked by using MEMS-reconfigurable surfaces. The phase-shifter is composed of three metallized silicon chips which are assembled in H-plane cuts of the waveguide. The measurement results of the first prototypes of the MEMS reconfigurable phase shifter show a linear phase shift of 20° in 10 steps (3.3 bit) and have a return loss better than 15 dB from 500-600 GHz. The insertion loss is better than 3 dB up to 540 GHz, and better than 5 dB up to 600 GHz for all phase states, of which the major part is contributed by the assembly of the microchips between waveguide flanges which has a reproducibility error between 2 and 6 dB measured for reference chips.
Starting Page	1
Ending Page	4
File Size	1596903
Page Count	4
File Format	PDF
ISBN	9781479982752
DOI	10.1109/MWSYM.2015.7166829
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-17
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Semiconductor device measurement Rectangular waveguides Electric variables measurement Hip Microscopy Switches terahertz Micromachined waveguide phase shifter RF MEMS rectangular waveguide submillimeter-wave
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in