NDLI: Performance of molybdenum as a mechanical membrane for RF MEMS switches

Content Provider	IEEE Xplore Digital Library
Author	Goldsmith, C. Forehand, D. Scarbrough, D. Johnston, I. Sampath, S. Datta, A. Peng, Z. Palego, C. Hwang, J.C.M.
Copyright Year	2009
Description	Author affiliation: MEMtronics Corporation, Plano, TX, 75075, USA (Goldsmith, C.; Forehand, D.; Scarbrough, D.) \|\| Lehigh University, Bethlehem, PA, 18015, USA (Peng, Z.; Palego, C.; Hwang, J.C.M.) \|\| Innovative Micro Technology, Santa Barbara, CA, 93117, USA (Johnston, I.; Sampath, S.; Datta, A.)
Abstract	This article details the construction and measurement of RF MEMS capacitive switches using molybdenum as the mechanical material. The resulting switches exhibit a significantly reduced rate of change in actuation voltage over temperature, with rates less than 0.03 V/°C up to 150°C. Resistivity of the molybdenum membranes averaged 10–11 μΩ-cm, yielding an effective shunt resistance of less than 0.25 Ω. Initial cycling measurements were made which show that the resulting membranes were capable of at least 20 billion cycles without failure, indicating that molybdenum is a promising mechanical material for constructing RF MEMS switches.
Starting Page	1229
Ending Page	1232
File Size	198660
Page Count	4
File Format	PDF
ISBN	9781424428038
ISSN	0149645X
DOI	10.1109/MWSYM.2009.5165925
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Biomembranes Radiofrequency microelectromechanical systems Switches Temperature Voltage Thermal stresses Structural beams Thermal expansion Residual stresses Microswitches temperature microelectromechanical systems RF MEMS MEMS switch molybdenum capacitive switch
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

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