NDLI: A 3.4 – 6.2 GHz Continuously tunable electrostatic MEMS resonator with quality factor of 460

Content Provider	IEEE Xplore Digital Library
Author	Xiaoguang Liu Katehi, L.P.B. Chappell, W.J. Peroulis, D.
Copyright Year	2009
Description	Author affiliation: Birck Nanotechnology Center, School of Electrical and Computer Engineering, Purdue University, USA (Xiaoguang Liu; Chappell, W.J.; Peroulis, D.) \|\| University of Illinois, Urbana-Champaign, USA (Katehi, L.P.B.)
Abstract	In this paper we present the first MEMS electrostatically-tunable loaded-cavity resonator that simultaneously achieves a very high continuous tuning range of 6.2 GHz:3.4 GHz (1.8:1) and quality factor of 460–530 in a volume of 18×30×4 $mm^{3}$ including the actuation scheme and biasing lines. The operating principle relies on tuning the capacitance of the loaded-cavity by controlling the gap between an electrostatically-actuated membrane and the cavity post underneath it. Particular attention is paid on the fabrication of the tuning mechanism in order to avoid a) quality factor degradation due to the biasing lines and b) hysteresis and creep issues. A single-crystal silicon membrane coated with a thin gold layer is the key to the success of the design.
Starting Page	1149
Ending Page	1152
File Size	527764
Page Count	4
File Format	PDF
ISBN	9781424428038
ISSN	0149645X
DOI	10.1109/MWSYM.2009.5165905
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatics Micromechanical devices Q factor Biomembranes Capacitance Fabrication Degradation Hysteresis Creep Silicon tunable resonator Evanescent-mode cavity MEMS quality factor tuning tunable filter
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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