NDLI: SRAM failure analysis evolution driven by technology scaling

Content Provider	IEEE Xplore Digital Library
Author	Zhigang Song
Copyright Year	2014
Description	Author affiliation: IBM Syst. & Technol., Hopewell Junction, NY, USA (Zhigang Song)
Abstract	Demand for high speed and more function microelectronic devices has driven semiconductor industry to continue developing technologies with ever-shrinking geometry. During technology development, Static Random Access Memory (SRAM) is often chosen as the process qualification and yield learning vehicle. Thus SRAM failure analysis is the major activity in any microelectronic device failure analysis lab. Conventional physical failure analysis in old technology nodes has achieved high success rate since the SRAM bitcell failures can be precisely localized by functional test and the defect causing such failures is within the failing bitcells. However, As SRAM feature size decreases with technology scaling down, the size of the defect causing SRAM failure also scales down. Some of the defects are so tiny that they are invisible in ultra-high resolution SEM. On the other hand, the SRAM bitcell number greatly increases, and thus the SRAM design, especially address decoder scheme becomes more complex. More and complicated SRAM logic type failures arise. Therefore, the conventional physical failure analysis has faced increasing challenges and encountered low success rate. This paper will talk about how SRAM failure analysis evolves to maintain high success rate.
Starting Page	223
Ending Page	230
File Size	4481529
Page Count	8
File Format	PDF
ISBN	9781479939312
ISSN	19461542
e-ISBN	9781479939299
DOI	10.1109/IPFA.2014.6898207
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-06-30
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Random access memory Failure analysis Transistors Decoding Imaging Metallization Resistance
Content Type	Text
Resource Type	Article

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