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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Dairiki, K. Yamada, A. Konagai, M. Merkulov, A. Asomoza, R. |
| Copyright Year | 1997 |
| Description | Author affiliation: Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Japan (Dairiki, K.) |
| Abstract | We have applied SiH/sub 2/Cl/sub 2/ addition together with H/sub 2/ dilution to a-Si:H films and solar cells fabricated by mercury-sensitized photo-CVD. It was observed by SIMS measurements that Cl was incorporated into a-Si:H films over 10/sup 18/ atom/cm/sup 3/, even at the flow rate ratio of 0.01(SiH/sub 2/Cl/sub 2/ to SiH/sub 4/). Furthermore, it was found that excess Cl incorporated in a-Si:H films had been removed by H/sub 2/ dilution. With H/sub 2/ dilution, we could control the excess acceptor states of a-Si:H films grown by SiH/sub 2/Cl/sub 2/ addition and when we applied them to the i-layer of a-Si solar cells, quantum efficiencies increased at all wavelength region and especially at middle wavelength region which is sensible to the electric field weakening of the i-layer by light induced degradation. As a result, we have achieved a high stabilized efficiency of 9.0% for an 1 cm/sup 2/ single-junction a-Si:H solar cell. |
| Starting Page | 779 |
| Ending Page | 782 |
| File Size | 387378 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780337670 |
| ISSN | 01608371 |
| DOI | 10.1109/PVSC.1997.654205 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1997-09-29 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fabrication Photovoltaic cells Hydrogen Fluid flow measurement Glass Atomic measurements Density measurement Wavelength measurement Agricultural engineering Lighting control |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering |
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