NDLI: Glass Reflowed Microlens Array and its Optical Characteristics

Content Provider	IEEE Xplore Digital Library
Author	Sung-Kil Lee Man Geun Kim Kyung-Woo Jo Jong-Hyun Lee
Copyright Year	2007
Description	Author affiliation: Gwangju Inst. of Sci. & Technol., Gwangju (Sung-Kil Lee; Man Geun Kim; Kyung-Woo Jo; Jong-Hyun Lee)
Abstract	We have demonstrated glass microlens array fabricated by thermal reflow process to take advantage of durable lens material and simple process. The microlens was designed using ray tracing, and was realized by controlling the diameter and height of cylindrical glass pattern. The glass pattern (Diameter x Height = 250 x 28 um) was formed by etching a glass plate with HF solution for 4 min (E/R: ~7 um). Then the glass pattern was reflowed at 850degC that is above the glass transition temperature (Tg = 820degC), in the furnace to form a spherical shape. The profile of microlens was measured using a confocal microscopy and the diameter of the spherical shape is larger than 80 percent of the mask pattern size. The fabricated microlens was evaluated in terms of focal length (~600 um) and beam waist (~12 um) using an IR source (lambda=1550 nm).
Starting Page	75
Ending Page	76
File Size	430483
Page Count	2
File Format	PDF
ISBN	9781424406418
DOI	10.1109/OMEMS.2007.4373847
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-08-12
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical arrays Glass Lenses Microoptics Shape measurement Thermal lensing Optical materials Ray tracing Etching Hafnium Transition Temperature Microlens Array Glass Reflow Focal Length Wet Etching
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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