NDLI: High-Accuracy Digital-to-Analog Actuators Using Parallel Spring Array

Content Provider	IEEE Xplore Digital Library
Author	Won Han Young-Ho Cho
Copyright Year	2007
Description	Author affiliation: Korea Adv. Ins. of Sci. & Technol., Daejeon (Won Han; Young-Ho Cho)
Abstract	We present a high-accuracy micromechanical digital-to-analog (DA) actuator using parallel interconnection of identical springs. The parallel DA actuator achieves a high-accuracy cascaded actuation because it is independent of spring variation caused by fabrication error. We design the parallel DA actuator using 4-bit digital actuators, whose four different unit displacement of $x_{1}=7.0$ mum, $x_{2}=5.8$ mum, x3=4.8 mum, and x4=4.0 mum are designed to make the output displacement linear for the output range of 0~5.4 mum. In experimental study, the output range and nonlinearity are measured as 0~4.7 mum and 8.65%, respectively. The parallel DA actuator generates the output displacement with the accuracy of 0.29 plusmn 0.20 mum and the precision of 20.4 + 5.8 nm. We experimentally verify the positioning capability of the present parallel DA actuator is suitable for high-accuracy optical manipulation.
Starting Page	53
Ending Page	54
File Size	1016691
Page Count	2
File Format	PDF
ISBN	9781424406418
DOI	10.1109/OMEMS.2007.4373836
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-08-12
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Springs Micromechanical devices Hydraulic actuators Mirrors Etching Displacement measurement Position measurement Measurement standards Telecommunication standards Fabrication high-accuracy actuation Digital-to-analog actuators parallel spring array
Content Type	Text
Resource Type	Article

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