NDLI: Micro polarizing beam splitter for blue wavelength optical pickups application

Content Provider	IEEE Xplore Digital Library
Author	Chi-Hung Lee Wang-Ling Tsai Yi Chiu Shieh, H.-P.D.
Copyright Year	2005
Description	Author affiliation: Dept. of Photonics & Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu (Chi-Hung Lee; Wang-Ling Tsai)
Abstract	Micro polarizing beam splitters (micro PBS) are required in micro optical systems for sensing and signal processing when the polarization state is a concern. In this paper, silicon nitride thin films with low stress and low absorption at 405 nm wavelength were investigated. The reflectance and the transmittance of TM and TE modes of a pop-up micro-PBS composed of a silicon nitride thin film and a poly-silicon frame were examined. Two types of micro PBSs based on low stress silicon nitride were successfully demonstrated. The performance agreed well with calculation. Such devices can be applied for micro optical pickups in data storage systems
Starting Page	91
Ending Page	92
File Size	336367
Page Count	2
File Format	PDF
ISBN	0780392787
DOI	10.1109/OMEMS.2005.1540092
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-08-01
Publisher Place	Finland
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical polarization Optical beam splitting Optical signal processing Optical films Optical sensors Silicon Semiconductor thin films Stress Absorption Reflectivity
Content Type	Text
Resource Type	Article

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Micro polarizing beam splitter for blue wavelength optical pickups application