NDLI: High-accuracy micro-encoder based on the higher-order diffracted light interference

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High-accuracy micro-encoder based on the higher-order diffracted light interference

Content Provider	IEEE Xplore Digital Library
Author	Higurashi, E. Sawada, R.
Copyright Year	2000
Description	Author affiliation: NTT Telecommun. Energy Labs., Kanagawa, Japan (Higurashi, E.)
Abstract	A new type of high-accuracy optical encoder based on higher-order diffracted light interference is proposed. For a relative movement between the scale grating and the encoder head, the encoder provides sinusoidal signals whose period (0.53 /spl mu/m) is one-sixth of that (3.2 /spl mu/m) of the scale grating, from which the displacement or revolution angle can be accurately determined. The proposed micro-encoder structure includes a laser diode, two-segment photodiodes, polyimide waveguides, and a micro-grating that makes /spl plusmn/3 order beams diffracted by the scale grating interfere coaxially, all on the same silicon substrate (3/spl times/2 mm/sup 2/).
Starting Page	143
Ending Page	144
File Size	195357
Page Count	2
File Format	PDF
ISBN	0780362578
DOI	10.1109/OMEMS.2000.879666
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-08-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical diffraction Interference Diode lasers Photodiodes Polyimides Optical waveguides Laser beams Diffraction gratings Coaxial components Silicon
Content Type	Text
Resource Type	Article

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