NDLI: Magnetostrictive 2-D scanners and pig-tailed tunable MEMS filters-studies on vacuum packaging and interconnection of optical MEMS

Content Provider	IEEE Xplore Digital Library
Author	Fujita, H.
Copyright Year	2000
Description	Author affiliation: Dept. of Ind. Sci, Tokyo Univ., Japan (Fujita, H.)
Abstract	The key concept of micromachining technologies is to extend the VLSI fabrication capability to realize three-dimensional microsystems which are composed of electrical, mechanical, chemical and optical elements. Using VLSI fabrication processes such as photolithography, film deposition and etching, it is possible to obtain sub-micrometer-precision structures in a large quantity with excellent alignment between each other. In addition, movable structures such as micro gears and motors can be made by surface micromachining processes. Precise V-grooves and moles going through the substrate can be etched bp dry and wet etching. Such micromachining technologies have the following implications for optical systems: integration of devices; accurate pre/passive alignment; feature size comparable to wavelength; arrayed and repetitive structures; wavelength independence; free-space optics with short propagation path; high sensitivity and fast response; local servo feedback; hermetic/vacuum packaging. Examples of these implications are given for a pigtailed silicon platform for integrating optical fibres and micromachined devices, and a 2D micro-optical scanner.
Starting Page	5
Ending Page	6
File Size	241027
Page Count	2
File Format	PDF
ISBN	0780362578
DOI	10.1109/OMEMS.2000.879600
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-08-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetostriction Micromechanical devices Optical feedback Optical films Micromachining Optical sensors Chemical technology Very large scale integration Optical device fabrication Chemical elements
Content Type	Text
Resource Type	Article

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