NDLI: Progress in deep-UV liquid immersion mastering of high density optical discs

Content Provider	IEEE Xplore Digital Library
Author	Neijzen, J. van Santen, H.
Copyright Year	2002
Description	Author affiliation: Philips Res. Labs., Eindhoven, Netherlands (Neijzen, J.; van Santen, H.)
Abstract	In the blue generation of optical discs, the ROM capacity required on a single layer of a 12 cm disc is 25 GB and higher. Far field deep-UV mastering equipment has been successfully applied to record densities up to 20 GB. Higher densities, however, are increasingly difficult to master and a further reduction of the writing spot of the recorder seems to be required. Apart from the option to switch to e-beam recording, liquid immersion deep-UV mastering offers an interesting possibility to extend the density range of conventional laser beam recorders. In this concept, a resolution improvement is realized by increasing the numerical aperture to values above 1. In this paper experiments are described aimed at the mastering of high density ROM discs by means of the deep-UV liquid immersion technique.
Sponsorship	IEEE/Lasers & Electro-Opt. Soc. OSA - Opt. Soc. America SPIE - Int. Soc. Opt. Eng. JSAP - Japan Soc. Appl. Phys. MSJ - Magnetics Soc. Japan OITDA - Optoelectron. Ind. & Technol. Dev. Assoc. IEICE Chemical Soc. Japan Inf. Process. Soc. Japan Inst. Electr. Eng. Japan Inst. Image Inf. & Telev. Eng. Japan Soc. Precision Eng. Laser Soc. Japan
Starting Page	299
Ending Page	301
File Size	245814
Page Count	3
File Format	PDF
ISBN	0780373790
DOI	10.1109/OMODS.2002.1028647
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-07-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lenses Writing Resists Optical recording Laser beams Power lasers Optical films Read only memory Switches Apertures
Content Type	Text
Resource Type	Article

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