NDLI: Electron beam recording with a novel differential pumping head realizing over 50 GB/layer capacity disc

Content Provider	IEEE Xplore Digital Library
Author	Takeda, M. Furuki, M. Yamamoto, M. Aki, Y. Kawase, H.
Copyright Year	2002
Description	Author affiliation: Opt. Disc Dev. Div, Sony Corp., Tokyo, Japan (Takeda, M.; Furuki, M.; Yamamoto, M.)
Abstract	High density mastering is the key technology to manufacture next generation optical disc recording with over 20 GB capacity for more than 2 hours of HDTV digital data. We developed a deep UV laser beam recorder (DUV-LBR) and the related mastering process to achieve such a high density (M. Takeda et al, Jpn. J. Appl. Phys. vol. 38, pp. 1837-1838, 1999), which is now to be introduced in the disc mastering process line of DVR-blue (I. Ichimura et al, Tech. Dig. ODS2001, pp. 139-141, 2001). Beyond DUV-LBR, an electron beam recorder (EBR) was proposed to produce further high density pit patterns (Y. Wada et al, Jpn. J. Appl. Phys. vol. 40, pp. 1653-1660, 2001). We have developed a new concept EBR with a novel differential pumping head attached to the bottom portion of the electron beam column. It has no vacuum chamber and an air-spindle motor with a translation stage under the electron beam column is installed in the atmosphere like a conventional LBR. The differential pumping head effectively separates the high vacuum region and the surrounding atmospheric pressure region. The high vacuum region, which is necessary for the electron beam emitted from the column and focused onto the resist coated silicon (Si) substrate, is confined within only a narrow gap between the head and the resist surface. As the spindle motor and the translation stage are operated not in a vacuum chamber but in the atmosphere, high speed recording with sufficient rotational and translational accuracy can be attained. Furthermore, the main body of the EBR can be very compact and cost effective due to the lack of a large and expensive vacuum chamber. In this paper, we report 25 GB density recording performance of our newly developed EBR and some experimental results of recording and reproducing even higher densities up to 50 GB.
Sponsorship	IEEE/Lasers & Electro-Opt. Soc. OSA - Opt. Soc. America SPIE - Int. Soc. Opt. Eng. JSAP - Japan Soc. Appl. Phys. MSJ - Magnetics Soc. Japan OITDA - Optoelectron. Ind. & Technol. Dev. Assoc. IEICE Chemical Soc. Japan Inf. Process. Soc. Japan Inst. Electr. Eng. Japan Inst. Image Inf. & Telev. Eng. Japan Soc. Precision Eng. Laser Soc. Japan
Starting Page	18
Ending Page	20
File Size	300494
Page Count	3
File Format	PDF
ISBN	0780373790
DOI	10.1109/OMODS.2002.1028553
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-07-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electron beams Disk recording Magnetic heads Optical recording Atmosphere Resists Manufacturing Electron optics High speed optical techniques Optical pumping
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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