NDLI: Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based x-ray imaging detectors

Content Provider	IEEE Xplore Digital Library
Author	Badel, X. Linnros, J. Kleimann, P. Norlin, B. Koskiahde, E. Valpas, K. Nenonen, S. Petersson, S. Frojdh, C.
Copyright Year	2004
Description	Author affiliation: Dept. of Microelectron. & Inf. Technol., R. Inst. of Technol. of Sweden, Kista, Sweden (Badel, X.; Linnros, J.)
Abstract	Silicon Charge Coupled Devices (CCD) covered with a scintillating film are now available on the market for use in digital medical imaging. However, these devices could still be improved in terms of sensitivity and especially spatial resolution by coating the CCD with an array of scintillating waveguides. In this work, we fabricated such waveguides by first etching pores in silicon, then pet-forming metallization or oxidation of the pore walls and finally filling the pores with CsI(Tl). The resulting structures were observed using SEM and tested under X-ray exposure. The detector performances were also compared with simulations, indicating that the optimal pore depth for metallized macropore arrays is about 80/spl mu/m while it is around 350/spl mu/m for oxidized ones. This result, together with the roughness of the metal coating, explains why lower performances were measured experimentally with the metallized macropores. Indeed, our macropore arrays had depths in the range of 210-390/spl mu/m, which is favorable to oxidized structures.
Starting Page	1006
Ending Page	1010
File Size	1404962
Page Count	5
File Format	PDF
ISBN	0780382579
ISSN	10823654
DOI	10.1109/NSSMIC.2003.1351864
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-19
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Metallization Silicon Sensor arrays X-ray imaging X-ray detection X-ray detectors Charge coupled devices Coatings Charge-coupled image sensors Semiconductor films
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based X-ray imaging detectors

Energy and time response of CCD X-ray detectors

A pixelated BGO scintillator array for high energy 'flash' radiography

Experimental comparison of pixel detector arrays and CCD-based systems for X-ray area detection on synchrotron beamlines

X-ray pixel detector for crystallography

Applied Technique and Development Trend of CCD Image Sensor

Imaging of laser-imploded targets with X-ray CCD cameras

CCD image sensor degradation by X-ray radiation

High resolution X-ray sensor for non destructive evaluation

Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based x-ray imaging detectors

Similar Documents

Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based X-ray imaging detectors

Energy and time response of CCD X-ray detectors

A pixelated BGO scintillator array for high energy 'flash' radiography

Experimental comparison of pixel detector arrays and CCD-based systems for X-ray area detection on synchrotron beamlines

X-ray pixel detector for crystallography

Applied Technique and Development Trend of CCD Image Sensor

Imaging of laser-imploded targets with X-ray CCD cameras

CCD image sensor degradation by X-ray radiation

High resolution X-ray sensor for non destructive evaluation

Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based x-ray imaging detectors