NDLI: A Ka-band RF-MEMS phase shifter approach based on a novel dual-state microstrip line

Content Provider	IEEE Xplore Digital Library
Author	Siegel, C. Zieglerl, V. Prechtel, U. Schonlinner, B. Schumacher, H.
Copyright Year	2007
Description	Author affiliation: EADS Deutschland GmbH, Munich (Siegel, C.; Zieglerl, V.; Prechtel, U.; Schonlinner, B.)
Abstract	This paper presents the design and realization of a 3-bit RF-MEMS based phase shifter at 34 GHz using a very low complexity and highly reliable RF-MEMS technology on silicon. The three bits of the circuit use different techniques to achieve the necessary phase shifts. One new design technique, the dual-state microstrip line, is enabled by the presented RF-MEMS technology and changes the effective $epsiv_{r}$ of a microstrip transmission line by lifting part of it into the air. This leads to a change in the electrical length of the microstrip transmission line, which in turn results in a phase shift. The related insertion loss of the 45deg bit is less then -0.35 dB and a matching better -19 dB for both switching states. Further on, a loaded-line bit with 45deg of phase shift is realized by switching between a capacitive and an inductive load. The capacitive switching state shows an insertion loss of -0.4 dB and a matching better -13 dB, while the inductive load has an insertion loss of -0.7 dB and a matching of -25 dB. The loaded-line bit combined with the dual-state microstrip line is used for the 90deg- bit. An additional miniaturized switched line phase shifter is implemented for the 180deg state. The three bits were combined and measured in all states. The results of the 3-bit phase shifter are shown with a mean insertion loss of -2.2 dB and a phase derivation of 13.25deg at 34 GHz.
Starting Page	1221
Ending Page	1224
File Size	619693
Page Count	4
File Format	PDF
ISBN	9782874870019
DOI	10.1109/EUMC.2007.4405420
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-10-09
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	European Microwave Association
Subject Keyword	Radiofrequency microelectromechanical systems Phase shifters Insertion loss Silicon Microstrip components Switches Phased arrays Stress Power transmission lines Costs
Content Type	Text
Resource Type	Article

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