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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Tumarkin, A.V. Razumov, S.V. Gagarin, A.G. Kozyrev, A.B. |
| Copyright Year | 2003 |
| Description | Author affiliation: St. Petersburg Electrotechnical University, Department of Electron Ion and Vacuum Technology, 5 Prof.Popov str., 197376, St. Petersburg, Russia, Tel: +7 812 234 59 80, Fax: 7 812 234 48 09, E-mail: thinfilm@eltech.ru (Kozyrev, A.B.) |
| Abstract | The influence of deposition parameters on microwave properties of BaxSr1-xTiO3 (BSTO) films deposited on alumina substrate has been investigated in a wide frequency range (1-30 GHz). The best combination of high tunability (n) and low losses (tan ¿) at room temperature was obtained for the 30% Ba content target. The best BSTO films exhibited n = 2.1 and tan¿=0.016 at 1 GHz and zero bias. This result is among the best reported for sputtered BSTO on alumina substrates. |
| Starting Page | 1315 |
| Ending Page | 1317 |
| File Size | 118178 |
| Page Count | 3 |
| File Format | |
| ISBN | 1580538347 |
| DOI | 10.1109/EUMA.2003.340861 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-10-02 |
| Publisher Place | Germany |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Quadratic programming Capacitors Decision support systems Copper Electrodes Microwave measurements Frequency measurement Loss measurement Thickness measurement Temperature distribution |
| Content Type | Text |
| Resource Type | Article |
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