NDLI: Fabrication of a micro-biochemical reactor with thick thermal isolation layer and integrated Pt heater/sensor in the micro-well

Content Provider	IEEE Xplore Digital Library
Author	Hoon-Sung Choi Chang-Taeg Seo Young-Min Kim Jang-Kyoo Shin Pyung Choi Jong-Hyun Lee
Copyright Year	2003
Description	Author affiliation: Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Daegu, South Korea (Hoon-Sung Choi; Chang-Taeg Seo; Young-Min Kim; Jang-Kyoo Shin; Pyung Choi; Jong-Hyun Lee)
Abstract	Recently many micro-biochemical reaction devices have been developed using MEMS technology because of the advantages of less required sample and reagent, fast reaction and less environmental contamination. The most important thing in biochemical reaction is temperature control. Unlike conventional micro-machined biochemical reactors which have an integrated heater and sensor at the backside of the wafer we have fabricated a thin Pt film heater and sensor on the bottom of the microwell at the frontside. In order to pattern inside the well, we used a thick negative Su-8 PR. As a desirable thermal isolation layer at the bottom of the well, we used a thick OPSL (oxidized porous silicon layer) formed by anodic reaction and multistep oxidation.
Sponsorship	Japan Soc. of Appl. Phys
Starting Page	326
Ending Page	327
File Size	158701
Page Count	2
File Format	PDF
ISBN	4891140402
DOI	10.1109/IMNC.2003.1268778
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-29
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Japan Soc. of Applied
Subject Keyword	Fabrication Inductors Thermal sensors Biosensors Thin film sensors Micromechanical devices Isolation technology Contamination Temperature control Silicon
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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