NDLI: Micro-powder blasting using nano-particles dispersed polymer mask

Content Provider	IEEE Xplore Digital Library
Author	Yagyu, H. Shigehiko, H. Tabata, O.
Copyright Year	2003
Description	Author affiliation: Mitsuboshi Belting Ltd., Kobe, Japan (Yagyu, H.; Shigehiko, H.)
Abstract	A new microfabrication technique to realize rapid prototyping of a glass was proposed. This technique consists of laser patterning of Au nano-particles dispersed polymer and micro-powder blasting. The patterned polymer was utilized as a mask material for the subsequent mechanical removal of the glass by the micro-powder blasting. Five different polymers were tested for the matrix material. Using a line and hole mask pattern, the fabricated channels in the glass with maximum aspect ration of 2.1 was realized and the prototype chip was produced. From this result, the validity of the micro-powder blasting using Au nano-particle dispersed polymer mask was confirmed. Moreover, we proposed the micro-powder blasting technique with elevated polymer mask temperature. Utilizing this method, improvement of the polymer mask erosion resistance was achieved.
Sponsorship	IEEE Robotics & Autom. Soc. City of Nagoya Nagoya Urban Ind. Promotion Corp. Chubu Ind. Advancement Center Nagoya Univ. Chubu Sci. & Technol. Center Nagoya City Sci. Museum Kagawa Univ. Gifu Univ. Int. Symppsium on Micromechatronics & Human Sci. Committee
Starting Page	95
Ending Page	100
File Size	340187
Page Count	6
File Format	PDF
ISBN	0780381653
DOI	10.1109/MHS.2003.1249916
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-19
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Polymers Gold Glass Prototypes Resists Optical materials Lithography Electrical resistance measurement Materials testing Temperature
Content Type	Text
Resource Type	Article

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