NDLI: Development of a micro force sensor for conduit guided wire and its application to micro master-slave systems

Content Provider	IEEE Xplore Digital Library
Author	Shimizu, S. Kuribayashi, K. Asari, M. Ueda, T.
Copyright Year	1997
Description	Author affiliation: Yamaguchi Univ., Japan (Shimizu, S.)
Abstract	This paper describes fabrication of a micro force sensor for conduit guided wire which is often used to drive a catheter in medical treatment. The diaphragm type force sensor of 2 mm/spl times/2 mm/spl times/216 /spl mu/m for the conduit with an outer diameter 320 /spl mu/m, an inner diameter 150 /spl mu/m and the wire with a diameter 100 /spl mu/m is fabricated. Photolithography, wet and dry oxidation, B-diffusion, through hole etching by TMAH techniques are used. The relation between loaded force and output voltage is measured to be linear with a sensitivity of 10.2 mV/gf under a constant supplied voltage. A micro master-slave system driven by conduit guided wire is expected to be applied to delicate surgical operations, assembling precise and small parts, etc. This system consists of a micro sized slave robot and a master manipulator of which the size is adapted to a human finger. Displacement and torque of the master side are reduced and transferred to the slave robot by controlling the brake torque against the master torque by feeding back tension signals of the force sensor in the slave robot. The master can feel the tensions by the brake torque, though conduit guided wire has a nonlinear input-output characteristics due to friction force.
Starting Page	185
Ending Page	190
File Size	350096
Page Count	6
File Format	PDF
ISBN	0780341716
DOI	10.1109/MHS.1997.768878
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-10-05
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Force sensors Wire Master-slave Robot sensing systems Force measurement Voltage Fabrication Catheters Medical treatment Lithography
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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