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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Siu Lun Cheung, L. Man Lee Yi-Kuen Lee Man Wong Zohar, Y. |
| Copyright Year | 2005 |
| Description | Author affiliation: Dept. of Aerosp. & Mech. Eng., Arizona Univ., Tucson, AZ, USA (Siu Lun Cheung, L.) |
| Abstract | The height effect on bubble dynamics in a microchannel is experimentally studied. We reported that the critical size for a nucleation site to be active increases linearly with the channel height. However, once a bubble is formed, its evolution from incipience to departure can also be channel-size dependent. Thus, various microchannel heat sinks have been fabricated, about 5-10 /spl mu/m in height, with integrated temperature sensors utilizing Si-to-glass anodic bonding technology. Nucleation sites have been formed on the microchannels bottom silicon surface in order to ensure regular bubble formation, while the sensors allow continuous monitoring of the wall temperature. The microchannels are capped by a glass wafer; hence, it is possible to record the bubble activity using video equipment. The three aspects of bubble dynamics: growth rate, departure size and release frequency have been characterized experimentally, and proper control parameters have been identified. |
| Starting Page | 670 |
| Ending Page | 673 |
| File Size | 779071 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780387325 |
| ISSN | 10846999 |
| DOI | 10.1109/MEMSYS.2005.1454018 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-01-30 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Microchannel Heat sinks Temperature sensors Wafer bonding Silicon Sensor phenomena and characterization Monitoring Glass Video equipment Frequency |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
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