NDLI: Flexible parylene actuator for micro adaptive flow control

Content Provider	IEEE Xplore Digital Library
Author	Pornsin-Sirirak, T.N. Tai, Y.C. Nassef, H. Ho, C.M.
Copyright Year	2001
Description	Author affiliation: Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA (Pornsin-Sirirak, T.N.)
Abstract	This paper describes the first flexible parylene electrostatic actuator valves intended for micro adaptive flow control for the future use on the wings of micro-air-vehicle (MAV). The actuator diaphragm is made of two layers of parylene membranes with offset vent holes. Without electrostatic actuation, air can move freely from one side of the skin to the other side through the vent holes. With actuation, these vent holes are sealed and the airflow is controlled. The membrane behaves as a complete diaphragm. We have successfully demonstrated this function using a 2-mm/spl times/2-mm parylene diaphragm electrostatic actuator valves. This work also includes the novel anti-stiction technology that is crucial to make such large-area parylene actuator diaphragm with the combined use of anti-stiction posts, self-assembled monolayers (SAM), surface roughening, and bromine trifluoride (BrF/sub 3/) dry etching. With the help of SAM treatment, the operating voltage is lowered from 30 volts to 13 volts. The load deflection method is then used to measure the effective thickness of the composite diaphragm. The flexible parylene diaphragm can be deflected up to 100 /spl mu/m when 150 Torr of pressure is applied. The result is fitted into a theoretical model and yields an effective thickness of 5.9 /spl mu/m, which is agreeable with the actual thickness of 5.6 /spl mu/m, thus proves the functionality of the device.
Sponsorship	IEEE Robotics & Autom Soc
Starting Page	511
Ending Page	514
File Size	426150
Page Count	4
File Format	PDF
ISBN	0780359984
ISSN	10846999
DOI	10.1109/MEMSYS.2001.906591
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-01-25
Publisher Place	Switzerland
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Programmable control Adaptive control Electrostatic actuators Vents Valves Biomembranes Skin Rough surfaces Surface roughness Surface treatment
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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