NDLI: Reliability investigation of NiPtSi electrical fuse with different programming mechanisms

Content Provider	IEEE Xplore Digital Library
Author	Tian, C. Moy, D. Messenger, B. Kothandaraman, C. Safran, J. Wu, S. Robson, N. Iyer, S.S.
Copyright Year	2007
Description	Author affiliation: IBM, Hopewell Junction (Tian, C.; Moy, D.; Messenger, B.; Kothandaraman, C.; Safran, J.; Wu, S.; Robson, N.; Iyer, S.S.)
Abstract	The reliability of NiPtSi/p-poly Si electrical fuses with different programming mechanisms, i.e. electromigration and thermal rupture, was investigated in terms of fuse resistance stability and fuse array functionality, for 65 nm technology node. The resistance of the fuses programmed within the electromigration programming window, were found to be very stable; resistance shift was only observed on fuses programmed in the under-programmed mode which results in incomplete electromigration. For fuses programmed with the thermal rupture mechanism, both resistance shift and functional sensing fails were observed. Furthermore, a guard band was defined for fuses programmed with electromigration mechanism, to ensure sufficient margins for fuse reliability. However, a guard band can not be defined for fuses programmed with rupture mode, due to the unpredictable nature of the rupture programming mechanism. The unprogrammed fuse elements were shown to be stable through extensive reliability evaluations.
Starting Page	90
Ending Page	93
File Size	405124
Page Count	4
File Format	PDF
ISBN	9781424417719
ISSN	19308841
DOI	10.1109/IRWS.2007.4469228
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-10-15
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fuses Electromigration Thermal resistance Electric resistance Circuit testing Thermal stresses Functional programming Semiconductor device reliability Thermal stability Circuit stability programming mechanism NiPtSi electrical fuse resistance stability reliability
Content Type	Text
Resource Type	Article

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