NDLI: The electrolytic capacitive displacement transducer for nano-technologies

Content Provider	IEEE Xplore Digital Library
Author	Castelli, F.
Copyright Year	2000
Description	Author affiliation: Dipt. di Elettrotecnica, Politecnico di Milano, Italy (Castelli, F.)
Abstract	The paper deals with the basic principle of a new capacitive displacement transducer, the "electrolytic capacitive transducer" (ECT), for small displacements (from a few micrometers to a few millimeters with nanometer resolution). The principle of the ECT is based on the use of both a very thin dielectric film between the faced electrodes and the enlargement of the effective equivalent faced electrodes surface by etching the dielectric film both obtained by the electrolytic capacitor construction technique. The transducer is designed in a differential form. Its electrodes are constructed by photochemical-etching. A first implementation prototype, a linear displacement form transducer, has been designed and constructed using a dielectric etched film of alumina, 0.35 /spl mu/m thick. The test results obtained on this prototype are critically analyzed. Its sensitivity and resolution are respectively 0.5 /spl mu/F/mm or 0.5 nF//spl mu/m and, by a 61/2 digit DMM, 2 nm nearly in absence of nonlinearities. On the basis of the present test results, a proposal for a variable absolute scale of capacitance and capacitive voltage divider is illustrated.
Starting Page	501
Ending Page	506
File Size	497322
Page Count	6
File Format	PDF
ISBN	0780358902
ISSN	10915281
DOI	10.1109/IMTC.2000.846916
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-05-01
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transducers Electrical capacitance tomography Dielectric films Electrodes Etching Prototypes Testing Capacitors Photochemistry Proposals
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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