NDLI: RF MIM capacitors using Si/sub 3/N/sub 4/ dielectric in standard industrial BiCMOS technology

Content Provider	IEEE Xplore Digital Library
Author	Arnould, J.-D. Benech, Ph. Cremer, S. Torres, J. Farcy, A.
Copyright Year	2004
Description	Author affiliation: IMEP, Grenoble, France (Arnould, J.-D.; Benech, Ph.)
Abstract	Metal-insulator-metal (MIM) capacitors are frequently applied in monolithic RF and microwave. Several 0.25 /spl mu/m-BiCMOS standard Si technology MIM capacitors with different device geometries were realised, measured and modeled in the GHz frequency range. Two different insulators are compared: SiO/sub 2/ of permittivity 4.2 and Si/sub 3/N/sub 4/ of permittivity 7.5. The theoretical SiO/sub 2/ and Si/sub 3/N/sub 4/ capacitance densities are respectively 1.06 fF//spl mu/m/sup 2/ and 2.07 fF//spl mu/m/sup 2/ for thickness of 35 nm and 32 nm. Experimental devices were characterised using a HP8720ES network analyser and on-wafer measurements with microwaves probes. The parasitic capacitances of the pad frame were accurately subtracted from the measurement data with a SOLT calibration and with an open de-embedding structure. A lumped element equivalent circuit for MIM capacitor is used to represent the different capacitors and other surrounding elements. All capacitor were analysed and experimental S-parameters were compared to the lumped element equivalent circuit, using agilent-advanced design system software. Good agreements between measured data and models were achieved between 45 MHz and 18 GHz for capacitances between 0.5 pF and 20.7 pF.
Starting Page	27
Ending Page	30
File Size	2099217
Page Count	4
File Format	PDF
ISBN	0780383044
DOI	10.1109/ISIE.2004.1571776
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-05-04
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radio frequency MIM capacitors Microwave devices Permittivity Parasitic capacitance Capacitance measurement Equivalent circuits Metal-insulator structures Measurement standards Geometry BiCMOS MIM Capacitors RF
Content Type	Text
Resource Type	Article

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