NDLI: Modeling of MEMS capacitive differential pressure sensor

Content Provider	IEEE Xplore Digital Library
Author	Eswaran, Parthasarathy Malarvizhi, S.
Copyright Year	2013
Description	Author affiliation: Department of Electronics and Communication Engineering, SRM University, Kattankulathur, Kancheepuram Dt.-603203, Tamil Nadu, India (Eswaran, Parthasarathy; Malarvizhi, S.)
Abstract	In this paper, modeling of high sensitive capacitive differential pressure sensor (CDPS) structure was proposed. The-working principle of CDPS was explained. Different types of CDPS structure for aircraft altimeter were designed. Polymide square diaphragm membrane is used to sense the pressure. Simulation was carried out for the range of pressure from 116 mbar to 1100 mbar, which is equivalent to aircraft flying altitude. Analysis was done with simulation results for centre deflection sensitivity and capacitive sensitivity for different models of CDPS structure. From the simulated results an improved CDPS models with bossed diaphragm membrane shows linear characteristics. The deflection sensitivity and capacitive sensitivity are 10.912nm/mbar and 3.025fF/mbar respectively.
Sponsorship	IEEE India Council ED Chapter
Starting Page	699
Ending Page	702
File Size	2448723
Page Count	4
File Format	PDF
ISBN	9781467349215
e-ISBN	9781467349222
DOI	10.1109/ICCPCT.2013.6528946
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-03-20
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Analytical models Modeling of CDPS Sensitivity Capacitive differential pressure sensor (CDPS) Deflection sensitivity Capacitive sensitivity MEMS CDPS Polymide diaphragm modeling
Content Type	Text
Resource Type	Article

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