NDLI: Software-defined microstrip antennas enabled through large vertical displacement zipper microactuators

Please wait, while we are loading the content...

Understanding the effect of electron gun geometry on emission characteristics for the purpose of optimizing the VAPoR time-of-flight mass spectrometer

3-D nanoporous optofluidic device for high sensitivity SERS detection

Agenda

Mid Atlantic Micro/Nano Alliance 2012 Symposium Poster List and Best Student Poster Ballot

Speaker introduction

Welcome letter

Software-defined microstrip antennas enabled through large vertical displacement zipper microactuators

Content Provider	IEEE Xplore Digital Library
Author	Felder, J. DeVoe, D.L. Lee, E. Walton, E.
Copyright Year	2012
Description	Author affiliation: Dept. of Electrical and Computer Engineering, The Ohio State University, Columbus, OH, USA (Walton, E.) \|\| Dept. of Mechanical Engineering, University of Maryland, College Park, MD, USA (Felder, J.; DeVoe, D.L.) \|\| Syntonics LLC, Columbia, MD, USA (Lee, E.)
Abstract	This paper describes a novel large-displacement electrostatic “zipper” microactuator capable of achieving hundreds of microns of out-of-plane deflection, and application of fabricated microactuators to the control of millimeter-scale microfabricated capacitive pixels enabling “software-defined” microstrip antennas. The software-defined microstrip patch antenna concept relies on a reconfigurable array of individually addressed pixels. Current antenna designs demand pixel footprints below 1 $mm^{2},$ with 300 urn vertical deflections, 1 ms response times, and low power consumption. To address this challenge we have developed a new technology based on electrostatic zipper actuation, in which a curved beam is switched between bistable states by application of a voltage across a dielectric film separating the beam from a flat electrode surface. This technology is novel in its use of SiO2 as both a high quality dielectric and the stressed layer of the bimorph providing curved actuation, enabling large out-of-plane deflection and large forces.
Starting Page	1
Ending Page	4
File Size	946097
Page Count	4
File Format	PDF
ISBN	9781467317818
e-ISBN	9781467317832
DOI	10.1109/MAMNA.2012.6195091
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-03-27
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Actuators Spirals Electrostatic Devices Microelectromechanical Systems Microactuators Dielectrics Zipper High-K Dielectric Materials Microstrip Antenna Fabrication Electrodes Analytical models Microstrip antennas Silicon
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Large Vertical Displacement Electrostatic Zipper Microstage Actuators

Electrostatic piggyback microactuators for head element positioning

Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

Foxtail actuators

Electrostatic curved electrode actuators

Displacement analysis of micromirror composed of large deflection spiral beams

Dielectric related effects in micromachined electrostatic actuators

Fabrication and dynamic testing of electrostatic actuators with p/sup +/ silicon diaphragms

Microactuation of suspended MEMS beams

Software-defined microstrip antennas enabled through large vertical displacement zipper microactuators

Similar Documents

Large Vertical Displacement Electrostatic Zipper Microstage Actuators

Electrostatic piggyback microactuators for head element positioning

Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

Foxtail actuators

Electrostatic curved electrode actuators

Displacement analysis of micromirror composed of large deflection spiral beams

Dielectric related effects in micromachined electrostatic actuators

Fabrication and dynamic testing of electrostatic actuators with p/sup +/ silicon diaphragms

Microactuation of suspended MEMS beams

Software-defined microstrip antennas enabled through large vertical displacement zipper microactuators