NDLI: Displacement analysis of micromirror composed of large deflection spiral beams

Content Provider	IEEE Xplore Digital Library
Author	Horie, M. Kamiya, D. Sadat, S.H.
Copyright Year	2009
Description	Author affiliation: Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan (Horie, M.; Kamiya, D.) \|\| Graduate School Student, Tokyo Institute of Technology, Yokohama, Japan (Sadat, S.H.)
Abstract	We present a new two-axis spiral-shaped micromirror manipulator developed for free space optical switching. The actuator is an electrostatic actuator, comprised of two different parts, which are fabricated using conventional surface micromachining processes and then assembled. In spite of the conventional monolithic self-assembling design approaches, these two parts are fabricated on two different chips and assembled using a spatial-mechanical approach from point of view of a simple MEMS-manufacturing process of each part. Making as one MEMS device becomes a lot of number of processes. Because a fixed place of the screw beam from the mirror device is at the position where only the height of a lower micro pyramid is low compared with the height of a central point. The design utilizes the increased flexibility of the spiral shaped electrode and zipping effect technique in order to increase the maximum tilt angle. The footprint of the assembled device is 600µm×600µm and height of the micro pyramid is 200µm.The switch was simulated using an energy concept and electromechanical coupled model. Its performance was measured statically using a reflection measurement approach. A continuous tilt actuation of 17 degree has been achieved with actuation voltage of 235 volts.
Starting Page	59
Ending Page	64
File Size	1542922
Page Count	6
File Format	PDF
ISBN	9781424442096
DOI	10.1109/ISOT.2009.5326099
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-21
Publisher Place	Turkey
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Spirals Switches Micromachining Fasteners Electrode shape Components micromirror Electrodes Microelectromechanical devices Microelectromechanical systems (MEMS) Optical switch Mirrors Micromirrors Assembly Electrostatic actuators Actuator
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Large-Deflection Spiral-Shaped Micromirror Actuator

Modelling of MEMS optical switches

Hybrid electrostatic actuator for micromirror tilting

Infrared micromirror array with large pixel size and large deflection angle

Large-stroke microelectrostatic actuators for vertical translation of micromirrors used in adaptive optics

New MOEMS-switch device with electrostatic actuator

Design, fabrication, and performance analysis of MEMS mirror with sidewall electrodes

A Micromirror With Large Static Rotation and Vertical Actuation

Robustness of electrostatic MEMS actuators against electrical overstress

Displacement analysis of micromirror composed of large deflection spiral beams

Similar Documents

Large-Deflection Spiral-Shaped Micromirror Actuator

Modelling of MEMS optical switches

Hybrid electrostatic actuator for micromirror tilting

Infrared micromirror array with large pixel size and large deflection angle

Large-stroke microelectrostatic actuators for vertical translation of micromirrors used in adaptive optics

New MOEMS-switch device with electrostatic actuator

Design, fabrication, and performance analysis of MEMS mirror with sidewall electrodes

A Micromirror With Large Static Rotation and Vertical Actuation

Robustness of electrostatic MEMS actuators against electrical overstress

Displacement analysis of micromirror composed of large deflection spiral beams