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Content Provider | IEEE Xplore Digital Library |
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Author | Wei-li Sun Feng-Chang Chuang Yu-Lin Song Chwen Yu Tzyh-Ghuang Ma Tzong-Lin Wu Luh-Maan Chang |
Copyright Year | 2013 |
Description | Author affiliation: Dept. of Civil Eng., Nat. Taiwan Univ., Taipei, Taiwan (Luh-Maan Chang) || Commun. & Electromagn. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan (Wei-li Sun; Tzyh-Ghuang Ma) || Taiwan Semicond. Manuf. Co., Ltd., Hsinchu, Taiwan (Chwen Yu) || Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan (Tzong-Lin Wu) || Dept. of Electr. Eng., Nat. Chung Hsing Univ., Taichung, Taiwan (Feng-Chang Chuang) || High Technol. Res. Center, Yen Tjing Ling Ind. Res. Inst., Taipei, Taiwan (Yu-Lin Song) |
Abstract | The extremely low frequency (ELF) magnetic field has significant impact on yield rate especially when the processing reaches less than 14 nanometer in next-generation nano-Fab. For sensitive equipments such as the SEMs, TEMs, STEMs, FIB writers, and E-beam writers, it suggests that the ELF magnetic field should be lower than 0.5 milli-Gauss to guarantee good yield. Therefore, mitigating the magnetic field by active/passive approaches such as the material shielding, wire permutation, and active canceling are highly demanded. |
Sponsorship | IEEE Electromagn. Compat. Soc. |
Starting Page | 119 |
Ending Page | 122 |
File Size | 1352960 |
Page Count | 4 |
File Format | |
ISBN | 9781479923151 |
DOI | 10.1109/EMCCompo.2013.6735184 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2013-12-15 |
Publisher Place | Japan |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Coils ELF(extremely low frequency) Prototype Magnetic sensors Prototypes Power amplifiers Helmholtz Coil Electromagnetic compatibility Magnetic fields Sensor |
Content Type | Text |
Resource Type | Article |
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