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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Chawla, T. Kaur, M. Singh, G. |
| Copyright Year | 2015 |
| Description | Author affiliation: C-DAC, Mohali, India (Chawla, T.; Kaur, M.; Singh, G.) |
| Abstract | This paper presents design and sensitivity analysis of a 3D inter-digitated combs and folded beam structure based MEMS accelerometer. Initially a mathematical model of the accelerometer is developed and its effects on the displacement sensitivity and capacitance sensitivity are analyzed. It is observed that the sensitivity of accelerometer can be improved through optimal selection of design parameters viz. beam length, beam width, overlap area, mass width, number of fingers. Finally the structure is designed in COMSOL multiphysics simulation tool to extract the device sensitivities. The structure of comb type 3D accelerometer comprises of a proof mass, 24 sensing fingers, 8 driving fingers, folded beams (springs) and two anchors. The beam length is 350 μm, beam width is 2 μm, spring constant is 0.4564 N/m, anchor area is 40×40 $μm^{2},$ mass width is 70 μm and mass length is 350 μm. The obtained value of displacement between combs is 0.154 nm when 1 g acceleration is applied on the movable mass and displacement sensitivity is 0.154 nm/g. The corresponding capacitance sensitivity is $7.85×10^{-18}$ F. The stress analysis at different values of acceleration is also carried out. |
| Starting Page | 965 |
| Ending Page | 970 |
| File Size | 1310564 |
| Page Count | 6 |
| File Format | |
| e-ISBN | 9781479971657 |
| DOI | 10.1109/IIC.2015.7150884 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-05-28 |
| Publisher Place | India |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Accelerometers Displacement sensitivity Interdigitated combs Folded beam Micromechanical devices Sensitivity Fingers Accelerometer Capacitance Acceleration Capacitive sensitivity Springs Electrostatics |
| Content Type | Text |
| Resource Type | Article |
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