NDLI: Design and electro-thermo-mechanical analysis of high temperature molybdenum microheaters for exhaust gas sensing applications

Content Provider	IEEE Xplore Digital Library
Author	Rajeswara Rao, L.L. Singha, M.K. Kiruba, M.S. Nagaraju, J.
Copyright Year	2015
Description	Author affiliation: Dept. of Instrum. & Appl. Phys., Indian Inst. of Sci., Bangalore, India (Rajeswara Rao, L.L.; Singha, M.K.; Kiruba, M.S.; Nagaraju, J.)
Abstract	Microheaters play a vital role in gas sensor applications. Exhaust gas sensors need high temperature microheaters to heat sensing films uniformly at low powers. In this paper, we present design and electro-thermo-mechanical analysis of molybdenum microheaters suitable for high temperature exhaust gas sensors. Double-spiral (DS), double-meander (DM), cross-meander (CS), modified-S (MS) and modified double spiral (MDS) shape structures were considered for simulation. The geometry of the resistive structure was optimized to improve temperature uniformity over a heating area of 500 × 500 $μm^{2}.$ Simulations show that the microheater consumed 83.65 mW power to reach a maximum temperature of 800 °C with a temperature gradient of 8.2°C. Structural deformation of the microheater membrane was studied to determine its stability and reliability under high thermal stresses. The maximum membrane deformation was found to be 15.25 μm at 800°C. Platinum, tungsten and molybdenum microheaters were compared in terms of their power consumption, temperature gradient and membrane deformations.
Starting Page	624
Ending Page	628
File Size	690359
Page Count	5
File Format	PDF
ISBN	9781479998548
e-ISBN	9781479998555
DOI	10.1109/ICSTM.2015.7225489
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-06
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature sensors Temperature distribution Power demand Spirals Electro-thermo-mechanical analysis Heating Exhaust gas sensor Membrane deformation Molybdenum Gas detectors Temperature gradient Microheater
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Design, Electro-Thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing

Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications

Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors

Optimal microheater Patterns with PEDOT:PSS conductors for flexible sensor applications

PRT Embedded Microheaters for Optimum Temperature Distribution of Air-Suspended Structures for Gas Sensor Applications

Electro thermal analysis and fabrication of low cost microheater using a nickel alloy for low temperature MEMS based gas sensor application

Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review

Low power microheater-based combustible gas sensor with graphene aerogel catalyst support

A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor

Design and electro-thermo-mechanical analysis of high temperature molybdenum microheaters for exhaust gas sensing applications

Similar Documents

Design, Electro-Thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing

Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications

Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors

Optimal microheater Patterns with PEDOT:PSS conductors for flexible sensor applications

PRT Embedded Microheaters for Optimum Temperature Distribution of Air-Suspended Structures for Gas Sensor Applications

Electro thermal analysis and fabrication of low cost microheater using a nickel alloy for low temperature MEMS based gas sensor application

Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review

Low power microheater-based combustible gas sensor with graphene aerogel catalyst support

A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor

Design and electro-thermo-mechanical analysis of high temperature molybdenum microheaters for exhaust gas sensing applications