NDLI: Dispatching and conflict-free routing based on model predictive control in semiconductor fab

Content Provider	IEEE Xplore Digital Library
Author	Nakamura, R. Sawada, K. Shin, S. Kumagai, K. Yoneda, H.
Copyright Year	2014
Description	Author affiliation: Murata machinery, Ltd., Japan (Yoneda, H.) \|\| Dept. of Mech. Eng. & Intell. Syst., Univ. of Electro-Commun., Tokyo, Japan (Nakamura, R.; Sawada, K.; Shin, S.; Kumagai, K.)
Abstract	This paper proposes a new scheduling method of dispatching and conflict-free routing for overhead hoist transport (OHT) systems in semiconductor fabrication (Fab). This paper utilizes a model predictive control (MPC) strategy in which the cycle of measurement, prediction, optimization and control is repeated. The first aim of the MPC application is to set a small prediction horizon for the scheduling optimization, which leads to reduce computational complexity. The second aim is to address the dynamic situation such that transport requests are given in real time. This paper introduces a switching type multi-objective cost function and considers how the MPC based method adds new request tasks to the scheduling problem in real-time for the dynamic situation. To verify the validity of the proposed method, some numerical examples are shown.
Sponsorship	IEEE Syst., Man, Cybern. Soc.
Starting Page	254
Ending Page	259
File Size	446704
Page Count	6
File Format	PDF
e-ISBN	9781479945849
DOI	10.1109/CACS.2014.7097197
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-11-26
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Loading Switches Routing Dispatching Model Predictive Control Optimization Vehicles
Content Type	Text
Resource Type	Article

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