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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Tang Chun-hui Qian Yu-Liang Zhu Jun Yan Shu-jia |
| Copyright Year | 2010 |
| Description | Author affiliation: School of Optical-electrical and Computer Engineering, University of Shanghai for Science & Technology, China (Tang Chun-hui) || College of Electronics and Information Engineering, Tongji University, Shanghai, China (Qian Yu-Liang; Zhu Jun; Yan Shu-jia) |
| Abstract | Semiconductor manufacturing is one of the most complex manufacturing process. And job scheduling is a major problem in the semiconductor operation. A method of job scheduling in semiconductor manufacturing lines is proposed based on genetic algorithm and simulated annealing algorithm. Firstly each job is given a set of machine processing set* based on genetic algorithm, then the processing sequence of each machine can be arranged based on simulated annealing. This paper presents the reason and the solution in detail. The Minifab model is solved by the method and the result proves that this method is effective. |
| File Size | 503076 |
| File Format | |
| ISBN | 9781424481040 |
| e-ISBN | 9781424481064 |
| DOI | 10.1109/ICINA.2010.5636524 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-10-18 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Annealing Genetic algorithm Simulated annealing algorithm Minifab model Semiconductor manufacturing Workpiece scheduling |
| Content Type | Text |
| Resource Type | Article |
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